The SmartPower® AX2530 from MKS Instruments is a Microwave Power Generator that operates from 2440 to 2470 MHz. It delivers a plasma output power of up to 3 kW with a ripple of ±1% of output power. This microwave generator consists of a magnetron head and a power supply generator which can be placed up to 100 feet apart from each other. It is based on the MKS AX2500 design architecture that incorporates MKS field-proven technology and combines new design features to improve performance. The generator can be controlled remotely via analog, RS485, and DeviceNet interfaces. It requires a 3-phase AC supply of 200/208 V and complies with CE, ETL, Semi S2-93A, and F47 specifications. The AX2530 is available in a water-cooled enclosure that measures 178 x 483 x 584 mm (generator) & 254 x 193.5 x 368.3 mm (power head) with has WR284F (CPR284F flanges) waveguide interfaces.
