The RIU002710K0-20TG from RFHIC is a GaN RF Generator that operates from 25.8 to 28.5 MHz. It has 4 channels can can delivers an RF output power from 2.5 kW to 10 kW with an efficiency of up to 70%. The generator can provides continuous wave (CW) and pulse output power adjustable from 1W to 2500W at 27.12 MHz at each channel. It is ideal for microwave heating and drying, medical equipment, semiconductor equipment, PVD, PECVD and etch applications.
This generator is a combined-type RF generator system with an SSPA head and power supply unit. It is available in an 8U housing that measures 540 x 394 x 680 mm with a 1-5/8” EIA RF output port and HAN B (Harting) input port.
This RF generator requires an AC supply of 208 V and can be controlled via USB, D-net, RS-232/485 and EtherCat (CAT5 RJ-45) interfaces.
