The REXi-400-350K from RFPT is a LDMOS RF Generator that operates at 13.56 MHz. It has a high output power range from 4 to 400 W and low output range from 0 to 40 W. The REXi-400-350K utilizes DSP control technology through a balanced amplifier and supports frequency and pulse modulation schemes with optional CEX and phase shifter for enhanced functionality.
This RF generator is available in a rack mount air cooled enclosure that measures 483 x 431 x 89 mm and has N-Type female output connector. It is ideal for Descum systems, PECVD systems, PEALD systems, dry etch systems, coating and sputtering systems, OLED systems, atmospheric plasma systems, and medical applications. This RF generator requires an AC supply of 220 V via IEC 320 connector and consumes a current of 5 A.