EPS200MMW

Probe Station & System by FormFactor Inc. | Visit website (12 more products)

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The EPS200MMW from FormFactor Inc. is a 200 mm Manual Probe Station & System that is designed for mmW, THz and load-pull applications at 67 GHz and beyond. This solution can be tailored to address measurement needs for active and passive components through the terahertz frequency range. It has a high dynamic range and directivity without compromising electrical accuracy or mechanical stability. The system delivers excellent stability, making it easy to achieve high accuracy. Its polished granite base eliminates any thermal or mechanical influences, ensuring excellent planarity and system stability. An integrated vibration isolation solution and an optional vibration-isolation table maintain high-quality contacts throughout measurements.

The unique SIGMA™ options seamlessly integrate mmW heads and load pull tuners from leading measurement instrument suppliers, enabling the highest dynamic range and directivity without compromising electrical accuracy and mechanical stability. 

The SlimVue™ microscope mitigates mechanical interference for high-magnification optics required for smallpad probing. The backlash-free X-Y-Z movement of positioners, integrated planarization and a contact separation drive with 1 µm repeatability enable precise probe placement and contact repeatability, equivalent to semi-automated systems. 

The WinCal XE™ software, verified standards and optimized calibration boundary conditions achieve superior calibration accuracy up to THz range, verifying the accuracy of your measurement results.

The EPS200MMW is available in a solid cast frame and a platen with four-point support and has a polished granite base that delivers exceptional stability to achieve high accuracy and eliminates thermal or mechanical influences to ensure planarity. It also has an optional vibration-isolation table to maintain high-quality contacts throughout measurements and minimize pad damage.

Product Specifications

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Product Details

  • Part Number
    EPS200MMW
  • Manufacturer
    FormFactor Inc.
  • Description
    200 mm Manual Probe Station & System for mmWave, THz and Load-Pull Applications

General Parameters

  • Chuck Size
    200 mm
  • Chuck Planarity
    ±3 µm
  • Chuck Travel Range
    200 mm
  • Frequency
    Up to 110 GHz
  • Measurements Type
    RF
  • Microscope Zoom Range
    3x
  • Microsope Movement Range
    150 x 100 mm
  • Platen Z-Motion Range
    40 mm
  • Type
    Automatic
  • Applications
    RF/mmW/THz

Technical Documents