The EPS200RF from FormFactor is a 200 mm Advanced Manual Probing Solution for RF applications up to 67 GHz. It has the ability to probe pads as small as 25 μm x 35 μm and beyond. The system has a rigid and stable design with a cast frame and single platen with four-point support for high accuracy. It has an integrated vibration-isolation solution to protect contact quality over the measurement time. With optimized optics, backlash-free X-Y-Z movement of RF positioners, and a contact separation drive with 1 μm repeatability, it enables precise probe placement and contact repeatability which is comparable to semi-automated systems.
The EPS200R features an intuitive operation workflow with the innovative fine-glide chuck stage which offers both wide-range coarse movement and μm-level fine movement. It uses the WinCal XE™ RF on-wafer calibration software to ensure calibration accuracy. This probing system uses industry-benchmark cables that support the highest magnitude and phase stability of measurements. Customers can select 40, 50, or 67 GHz RF probes from FormFactor's Infinity Probe®, |Z| Probe®, ACP and FPC probe families for the best contact performance.
