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TS200

Probe Station & System by MPI Corporation (7 more products)
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The TS200 from MPI Corporation is a Probe Station & System with Chuck Size 200 mm, Chuck Travel Resolution 1 µm, Chuck to Platen Height 28 mm. Tags: Manual. More details for TS200 can be seen below.

Product Specifications

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Product Details

  • Part Number
    TS200
  • Manufacturer
    MPI Corporation
  • Description
    200 mm Manual Probe System

General Parameters

  • Chuck Size
    200 mm
  • Chuck Planarity
    ±10 um
  • Chuck Theta Coarse Travel
    ±360 Degree
  • Chuck Theta Fine Resolution
    ±7.5 x 10-3 Degrees
  • Chuck Travel Range
    240 x 315 mm
  • Chuck Travel Resolution
    1 µm
  • Diameter
    210 mm
  • Material
    Nickel Plated Steel
  • Measurements Type
    DC, RF
  • Microscope Travel Resolution
    5 µm
  • Microsope Movement Range
    2 x 2 Inches
  • Number of DC Positioners
    10x
  • Number of RF Positioners
    4x
  • Connectors
    BNC, BNC - Female
  • Platen Z-Motion Range
    20 mm
  • Type
    Manual
  • Chuck to Platen Height
    28 mm
  • Vacuum Hole Sections
    3 mm, 27 mm, 45 mm, 69 mm, 93 mm, 117 mm, 141 mm, 164 mm, 194 mm
  • Voltage
    500 V
  • Applications
    Device Characterization, Modeling, Wafer Level Reliability, Failure Analysis, IC Engineering and MEMS

Technical Documents
View details on the manufacturer's website
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