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The TP250 from PacketMicro, Inc. is a Probe Station & System with Chuck Travel Resolution 5 µm. More details for TP250 can be seen below.
Semi/Fully-Automated Probe System for DC/RF/mmWave/THz Applications
Autonomous Wafer Probing System for RF and mmWave Measurements
220 GHz Probe Station for On-Wafer Characterization of 5G/6G Devices
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