Bird, an RF test and measurement technology expert, has expanded its power sensor family with the introduction of the state-of-the-art 7037 Precision Pulse Power Sensor. The 7037 sensor builds upon Bird's existing sensor portfolio to provide one of the most accurate and cost-effective devices for measuring RF power.
The 7037-1-595701-xxyy is a 13.56 MHz sensor with an RF power accuracy of 0.5% across a power range from 10 W to 10 kW. This is the first product in the series to be released. Bird plans to introduce units at 400 kHz, 60 MHz, and additional frequencies in the future. Using this power sensor makes it easy to calibrate RF generators that are essential to semiconductor fabrication. By using the time domain analysis feature, a calibrated view of the RF pulse waveform which can enable a detailed characterization of high-power pulses. The logging capability supported by the sensor's Virtual Power Meter enables analysis of RF power data for system fingerprinting and a more streamlined process development.
Semiconductor circuits designed with smaller geometries and higher densities require the use of pulsing RF power in process recipes. RF generators are required to not only provide the pulsing capability but also have precision RF power setpoint accuracy. Bird’s 7037 Pulse Power Sensor is the solution for the calibration and verification of these pulsing RF generators. Calibration of the 7037 sensors is industry-leading, using Bird's latest calibration techniques, which have a traceable path to NIST.
The 7037 sensor is also essential in performing diagnostics when optimizing the performance of the power delivery to a plasma chamber. With the ability to measure multi-level pulses, this sensor can be placed in-line in a 50-ohm environment to identify issues during a processing step. System-to-system variation can also be quickly identified to help guide improvement activities. Bird's 7037 sensor enables fast and more detailed data collection for system and process optimization.
Key Features of the 7037 Power Sensor
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0.5% accuracy for greater confidence in calibrating and verifying RF generators
- Data logging for streamlining process development
- Time Domain Analysis for a more detailed investigation of pulses characteristics
- Multi-level pulse measurement for characterizing complex recipes
- NIST- traceable calibration for accuracy and uniformity
Click here to learn more about 7037 Precision Power Sensor.
