The RIU00273K0-20TG from RFHIC is a GaN RF Generator that operates from 25.8 to 28.5 MHz. This single channel generator can deliver an RF output power from 10 W to 3 kW with an efficiency of up to 70%. It supports both continuous wave (CW) and pulse output power. The generator is ideal for microwave heating and drying, medical equipment, semiconductor equipment, PVD, PECVD and etch applications.
This generator consists of an SSPA head and power supply unit. It is available in an 4U housing that measures 220 x 172 x 560 mm with a 7/16” DIN Female RF output port and HAN B (Harting) input port.
This RF generator requires an AC supply of 208 V and can be controlled via USB, D-net, RS-232/485 and EtherCat (CAT5 RJ-45) interfaces.
