1. everything RF
  2. Test & Measurement
  3. RF Probes & Systems
  4. Probe Stations & Systems
  5. MPI Corporation
  6. TS150

TS150

Probe Station & System by MPI Corporation (7 more products)
Download Datasheet
Request Quote

Note : Your request will be directed to MPI Corporation.

TS150 Image

The TS150 from MPI Corporation is a Probe Station & System with Chuck Size 150 mm, Chuck Travel Resolution 1 µm, Chuck to Platen Height 28 mm. Tags: Manual. More details for TS150 can be seen below.

Product Specifications

View similar products

Product Details

  • Part Number
    TS150
  • Manufacturer
    MPI Corporation
  • Description
    150 mm Manual Probe System

General Parameters

  • Chuck Size
    150 mm
  • Chuck Planarity
    ±10 um
  • Chuck Theta Coarse Travel
    ±360 Degree
  • Chuck Theta Fine Resolution
    ±7.5 x 10-3 Degrees
  • Chuck Travel Range
    180 x 230 mm
  • Chuck Travel Resolution
    1 µm
  • Chuck Z Fine Resolution
    1 µm
  • Chuck Z-Motion Range
    10 mm
  • Diameter
    160 mm
  • Material
    Nickel Plated Steel
  • Measurements Type
    DC, RF
  • Microscope Travel Resolution
    5 µm
  • Microsope Movement Range
    1 x 1 Inches
  • Number of DC Positioners
    10x
  • Number of RF Positioners
    4x
  • Connectors
    BNC, BNC - Female, Kelvin Triax, Kelvin Triax - Female
  • Platen Z-Motion Range
    20 mm
  • Type
    Manual
  • Chuck to Platen Height
    28 mm
  • Vacuum Hole Sections
    3 mm, 27 mm, 45 mm, 69 mm, 93 mm, 117 mm, 141 mm
  • Voltage
    500 V
  • Applications
    Device Characterization, Modeling, Wafer Level Reliability, Failure Analysis, IC Engineering and MEMS

Technical Documents
View details on the manufacturer's website
View similar products