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Paramount Series

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The Paramount Series from Advanced Energy Industries is a RF Plasma Source with Output Frequency 13.56 MHz/2 to 60 MHz, RF Power Level 15 to 6000 W. More details for Paramount Series can be seen below.

Product Specifications

Product Details

  • Part Number
    Paramount Series
  • Manufacturer
    Advanced Energy Industries
  • Description
    Advance Process Development 13.56 MHZ, 1.5 to 6 KW

General Parameters

  • Output Frequency
    13.56 MHz/2 to 60 MHz
  • RF Power Level
    15 to 6000 W
  • Frequency tuning
    5%
  • Application
    Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE
  • Control
    Digital
  • Impedance
    50 Ohms
  • Input Voltage
    187 to 528 VAC
  • Pulse State Time
    10 to 100 ms (Tuning)
  • Package
    Rack Mount
  • Interfaces
    RS-232, EthernetSM, EtherCAT, DeviceNet
  • Features
    CEX, HALO
  • Height
    3U Inches
  • Weight
    16 Kg, 36.5 Kg
  • Dimension
    5.25 (H) x 8.5 (W) x 17.4 Inches (D), 5.25 (H) x 19 (W) x 25.39 (D)

Technical Documents
View details on the manufacturer's website
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