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Paramount Plus Series

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The Paramount Plus Series from Advanced Energy Industries is a RF Plasma Source with Output Frequency 1 to 60 MHz, RF Power Level 5 to 15 kW. More details for Paramount Plus Series can be seen below.

Product Specifications

Product Details

  • Part Number
    Paramount Plus Series
  • Manufacturer
    Advanced Energy Industries
  • Description
    Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications

General Parameters

  • Output Frequency
    1 to 60 MHz
  • RF Power Level
    5 to 15 kW
  • Application
    Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE
  • Control
    Pulse
  • Input Voltage
    208 VAC
  • Power Accuracy
    ± 1 W or ± 1%
  • Rise Time/Fall Time
    1 to 25 usec
  • Package
    Rack Mount
  • Interfaces
    RS-232, Ethernet, DeviceNet, EtherCAT, AE Navigator match control
  • Features
    Pulsing, arc management, CEX, MBFT
  • Height
    3U, 4U

Technical Documents
View details on the manufacturer's website
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