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RF-H 600

RF Plasma Source by RIBER S.A. (2 more products)
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The RF-H 600 from RIBER S.A. is a RF Plasma Source with Output Frequency 13.56 MHz (Generator), Power Supply 600 W. More details for RF-H 600 can be seen below.

Product Specifications

Product Details

  • Part Number
    RF-H 600
  • Manufacturer
    RIBER S.A.
  • Description
    13.56 MHz, RF Plasma Source for Hydrogen

General Parameters

  • Output Frequency
    13.56 MHz (Generator)
  • Gases
    Hydrogen
  • Frequency tuning
    Automatic matching box
  • Cavity type
    One-piece cavity with patterned end
  • Application
    Research & production
  • Control
    Mass flow controller
  • Cooling
    0, 3 l/min, Air
  • Impedance
    50 Ohms
  • Plasma Chamber Material
    PBN
  • Power Supply
    600 W
  • Valve
    Isolation valve
  • Flange
    16/ VCR ¼’’

Technical Documents
View details on the manufacturer's website
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