The Application of Pressure Correction to RGA Test Results for Vacuum Sealed Quartz Resonators

Residual Gas Analysis (RGA) testing (also referred to as Internal Gas Analysis or Internal Vapor Analysis) is a test which quantitatively measures the concentrations of gases inside a hermetically sealed package using mass spectrometry. Of primary interest is the level of moisture inside the cavity however information on other gases can provide valuable information regarding package hermeticity, quality of the package sealing process, purity of back filling gas (If any), material outgassing information, internal gas chemical stability and other data which may be used to assess product quality and reliability. RGA testing requires extraction and analysis of the package internal atmosphere and is therefore usually a destructive test used in process control and failure analysis.