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FA-4

Probe Station & System by SemiProbe (9 more products)
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FA-4 Image

The FA-4 from SemiProbe is a Probe Station & System with Chuck Size 100 mm, Chuck Travel Resolution 0.1 µm. Tags: Automatic. More details for FA-4 can be seen below.

Product Specifications

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Product Details

  • Part Number
    FA-4
  • Manufacturer
    SemiProbe
  • Description
    Fully Automatic probe system

General Parameters

  • Chuck Size
    100 mm
  • Chuck Planarity
    ±8 µm
  • Chuck Theta Coarse Travel
    ±4 Degrees
  • Chuck Travel Range
    105 x 105 mm
  • Chuck Travel Resolution
    0.1 µm
  • Material
    Aluminum, stainless steel
  • Measurements Type
    DC, RF
  • Microscope Travel Resolution
    0.5 µm
  • Microsope Movement Range
    15 mm
  • Platen Z-Motion Range
    40 mm
  • Type
    Automatic
  • Scope Lift
    0.1 to 0.5 µm
  • Voltage
    110 to 220 V
  • Weight
    240 Kg

Technical Documents
View details on the manufacturer's website
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