The FA-6 from SemiProbe is a Fully Automatic Probe System that supports a wafer size of 150 mm. It operates in three modes: automatic, semi-automatic, and manual, and has production and analytical abilities. This probe system can handle 100 and 150-mm wafers & substrates (field upgradeable to 200 mm), trays of die, wafers, or wafers sawn on frames with dual-end effector and thin & warped wafers from 50-70 μm. It is based on SemiProbe’s patented adaptive architecture which allows all its foundation modules (bases, stages, chucks, microscope mounts, microscope movements, optics, manipulators, etc.) to be interchangeable and also offers multiple cassette options. The modular design of this system enables the acquisition of test capabilities to precisely match requirements and field upgradation according to changes in environment or test conditions.
The FA-6 measures 900 x 1625 x 2438 mm with optics, MHu, and a monitor/keyboard rack. It is ideal for DC, High Frequency, MEMS, discrete, integrated circuit, optoelectronics, HF/Microwave, and photovoltaic applications.
