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RF-2.75

RF Plasma Source by SVT Associates (2 more products)
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The RF-2.75 from SVT Associates is a RF Plasma Source with Gas Flow Rate 0.1 to 5 SCCM, RF Power Level 150 to 400 W, Source Diameter 1.30 Inches. More details for RF-2.75 can be seen below.

Product Specifications

Product Details

  • Part Number
    RF-2.75
  • Manufacturer
    SVT Associates
  • Description
    Mini RF Plasma Source for Research

General Parameters

  • Gas Flow Rate
    0.1 to 5 SCCM
  • RF Power Level
    150 to 400 W
  • Gases
    Oxide and Nitride
  • Frequency tuning
    Automatic
  • Source Diameter
    1.30 Inches
  • Application
    Nitride MBE, Oxide MBE, Research and production, Plasma Monitoring
  • Cooling
    0.17 GPM Flow Rate
  • Plasma Chamber Material
    PBN, Alumina, or Quartz
  • Flange
    2.75 Inches CF

Technical Documents
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