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MPS150

Probe Station & System by FormFactor Inc. | Visit website (12 more products)
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The MPS150 from FormFactor Inc. is a Probe Station & System with Chuck Size 150 mm, Chuck Travel Resolution 5 µm, Chuck to Platen Height 16 mm. Tags: Automatic, Manual. More details for MPS150 can be seen below.

Product Specifications

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Product Details

  • Part Number
    MPS150
  • Manufacturer
    FormFactor Inc.
  • Description
    150 mm Manual Probe System

General Parameters

  • Chuck Size
    150 mm
  • Chuck Planarity
    ±10 um
  • Chuck Theta Coarse Travel
    ±360 Degrees
  • Chuck Theta Fine Resolution
    ± 8 Degree
  • Chuck Travel Range
    155 x 155 mm
  • Chuck Travel Resolution
    5 µm
  • Diameter
    150 mm
  • Material
    Stainless steel
  • Measurements Type
    DC, RF
  • Microscope Travel Resolution
    5 µm
  • Microsope Movement Range
    50 x 50 mm
  • Platen Z-Motion Range
    40 mm
  • Type
    Automatic, Manual
  • Chuck to Platen Height
    16 mm
  • Vacuum Hole Sections
    22 mm, 42 mm, 66 mm, 88 mm, 110 mm, 132 mm (four holes in center with 2.5 mm x 4.3 mm distance)
  • Operating Temperature
    30 to 300 Degree C

Technical Documents
View details on the manufacturer's website
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