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TS300-SE

Probe Station & System by MPI Corporation (7 more products)
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The TS300-SE from MPI Corporation is a Probe Station & System with Chuck Size 300 mm, Chuck Travel Resolution 1 µm. Tags: Manual. More details for TS300-SE can be seen below.

Product Specifications

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Product Details

  • Part Number
    TS300-SE
  • Manufacturer
    MPI Corporation
  • Description
    300 mm Manual Probe System

General Parameters

  • Chuck Size
    300 mm
  • Chuck Planarity
    ±10 um
  • Chuck Theta Coarse Travel
    ±360 Degree
  • Chuck Theta Fine Resolution
    ±7.5 x 10-3 Degrees
  • Chuck Travel Range
    325 x 325 mm
  • Chuck Travel Resolution
    1 µm
  • Chuck Z Fine Resolution
    1 µm
  • Chuck Z-Motion Range
    5 mm
  • Diameter
    310 mm
  • Material
    Nickel Plated Steel
  • Measurements Type
    DC, RF
  • Microscope Travel Resolution
    5 µm
  • Microsope Movement Range
    2 x 2 Inches
  • Number of DC Positioners
    8x, 4x
  • Number of RF Positioners
    4x
  • Connectors
    BNC, BNC - Female
  • Type
    Manual
  • Scope Lift
    140 mm
  • Vacuum Hole Sections
    4 mm, 24 mm, 48 mm, 72 mm, 96 mm, 120 mm, 144 mm, 168 mm, 192 mm, 216 mm, 240 mm, 264 mm, 288 mm
  • Voltage
    500 V
  • Applications
    Device Characterization, Modeling, Wafer Level Reliability, Failure Analysis, IC Engineering and MEMS
  • Operating Temperature
    -60 to 300 Degree C

Technical Documents
View details on the manufacturer's website
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