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Apex Series

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The Apex Series from Advanced Energy Industries is a RF Plasma Source with Output Frequency 13.56 MHz, RF Power Level 1.5 to 10 kW. More details for Apex Series can be seen below.

Product Specifications

Product Details

  • Part Number
    Apex Series
  • Manufacturer
    Advanced Energy Industries
  • Description
    Apex RF Generators and Power-Delivery Systems

General Parameters

  • Output Frequency
    13.56 MHz
  • RF Power Level
    1.5 to 10 kW
  • Application
    Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD, ALE, Semiconductors, Flat panel displays, Data storage devices, Solar cells
  • Impedance
    50 Ohms
  • Input Voltage
    208 VAC
  • Package
    On-board chamber mount, on-tool frame mount, rack mount, and shoebox options
  • Interfaces
    RS-232, Analog, ethernet, DeviceNet
  • Features
    Pulsing, CEX
  • Height
    3U Inches
  • Dimension
    5.22 x 8.47 x 16.77 Inches (H x W x D), 5.25 (H) x 19 (W) x 23.67 (D) 3U 19 Inches rack
  • Temperature
    5 to 40 Degree C

Technical Documents
View details on the manufacturer's website
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