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DG-80

RF Plasma Source by Manitou Systems (3 more products)
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The DG-80 from Manitou Systems is a RF Plasma Source with Output Frequency 80 MHz/ 13.56MHz. More details for DG-80 can be seen below.

Product Specifications

Product Details

  • Part Number
    DG-80
  • Manufacturer
    Manitou Systems
  • Description
    High Density RF Plasma Sources

General Parameters

  • Output Frequency
    80 MHz/ 13.56MHz
  • Application
    cleaning and pre-conditioning of vacuum chambers and load locks
View details on the manufacturer's website
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