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  5. AX7610S

The AX7610S from MKS Instruments is a RF Plasma Source with Source Diameter 1 Inch, Power Supply 3 kW. More details for AX7610S can be seen below.

Product Specifications

Product Details

  • Part Number
    AX7610S
  • Manufacturer
    MKS Instruments
  • Description
    3 kW, Sapphire Chemical Plasma Source

General Parameters

  • Gases
    O2, N2, H2O, Ar, NF3, CF4, C2 F6
  • Operating Pressure
    2 to 8 Torr
  • Source Diameter
    1 Inch
  • Cooling
    0.35 gpm
  • Current
    1 A
  • Gas Line Connection
    0.25 Inch, 0.375 Inch VCR
  • Input Voltage
    24 VDC
  • Plasma Chamber Material
    Sapphire
  • Power Supply
    3 kW
  • Flange
    KF40, KF50
  • Height
    15.26 Inch
  • Weight
    4.5 kg
  • Dimension
    15.3 x 1 Inch (L x Dia)

Technical Documents
View details on the manufacturer's website

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