The eVerest from Advanced Energy Industries is an RF Plasma Generator that operates from 1 to 60 MHz. It delivers an RF output power of 3.5 to 10 kW and has a power accuracy of ± 1 W or ± 1% of the setpoint. This plasma generator has a pulse state time of 11 μs to 250 ms and a frequency tuning range of up to ±10%.
The eVerest RF plasma generator has advanced features like multi-level pulsing, arc management, CEX and MBFT. It has a full RF delivery system with multiple options for matching solutions and intelligent synchronization. This plasma generator is designed for dP/dZ stability and has programmable multi-level pulse profiles for better speed & control. It supports PowerInsight by Advanced Energy’s IoT ecosystem and enables novel process development for deposition and etch profiles of less than 2 nm.
This plasma generator can integrate seamlessly into any plasma system and provides reliable ignition with RF stability independent of cable length. It requires an AC supply of 208 or 400-480 V and can be controlled via EtherCAT, Ethernet, RS-232 & DeviceNet interfaces. The generator is ideal for Etch, PECVD, PVD, Chamber Clean, HDP-CVD, PEALD and ALE process applications.
