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ELITE-750FD-01

RF Plasma Source by MKS Instruments (5 more products)
ELITE-750FD-01 Image

The ELITE-750FD-01 from MKS Instruments is a RF Plasma Source with Output Frequency 13.56 MHz ± 0.005%, RF Power Level 1 to 750 W, Power Supply 110 - 253 VAC. More details for ELITE-750FD-01 can be seen below.

Product Specifications

Product Details

  • Part Number
    ELITE-750FD-01
  • Manufacturer
    MKS Instruments
  • Description
    13.56 MHz RF Plasma Generator

General Parameters

  • Output Frequency
    13.56 MHz ± 0.005%
  • RF Power Level
    1 to 750 W
  • Cooling
    Air-cooled
  • Power Accuracy
    ±2 W
  • Power Supply
    110 - 253 VAC
  • Weight
    9.2 kg
  • Dimension
    2U, full rack: 17 x 15 x 3.5 inches (width x depth x height)
  • Temperature
    5 - 40°C

Technical Documents

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