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RF-X 50/63

RF Plasma Source by RIBER S.A. (2 more products)
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The RF-X 50/63 from RIBER S.A. is a RF Plasma Source with Output Frequency 13.56 MHz (Generator), Power Supply 600 W. More details for RF-X 50/63 can be seen below.

Product Specifications

Product Details

  • Part Number
    RF-X 50/63
  • Manufacturer
    RIBER S.A.
  • Description
    High Speed RF Plasma Source for Nitrogen / Oxygen

General Parameters

  • Output Frequency
    13.56 MHz (Generator)
  • Gases
    Nitrogen / Oxygen
  • Frequency tuning
    Automatic matching box
  • Cavity type
    Cavity with end-piece
  • Application
    Research to production, Nitrides (GaInAlN…), diluted nitrides (GaInAsN, II-VI doping), Oxides (ZnO, spintronics, high-K…), diluted Oxides (Doping, mixed Nitride / Oxide)
  • Control
    Mass flow controller
  • Cooling
    0, 3 l/min, Air
  • Growth Rate
    up to several µm/h
  • Impedance
    50 Ohms
  • Plasma Chamber Material
    PBN, Quartz
  • Power Supply
    600 W
  • Valve
    Isolation valve
  • Flange
    16/ VCR ¼’’

Technical Documents
View details on the manufacturer's website
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