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RF-6.02

RF Plasma Source by SVT Associates (2 more products)
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The RF-6.02 from SVT Associates is a RF Plasma Source with Gas Flow Rate 0.1 to 10 SCCM, RF Power Level 200 to 2000 W, Source Diameter 3.50 Inches. More details for RF-6.02 can be seen below.

Product Specifications

Product Details

  • Part Number
    RF-6.02
  • Manufacturer
    SVT Associates
  • Description
    Production RF Plasma Source

General Parameters

  • Gas Flow Rate
    0.1 to 10 SCCM
  • RF Power Level
    200 to 2000 W
  • Gases
    Nitride, Oxide
  • Frequency tuning
    Automatic
  • Source Diameter
    3.50 Inches
  • Application
    Nitride MBE, Oxide MBE, Research and production, Plasma Monitoring
  • Cooling
    0.5 GPM
  • Growth Rate
    Up to 6 µm/hr
  • Plasma Chamber Material
    PBN, Alumina
  • Valve
    flux
  • Flange
    6.0 Inches CF

Technical Documents
View details on the manufacturer's website
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