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DG600

RF Plasma Source by Manitou Systems (3 more products)
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Product Specifications

Product Details

  • Part Number
    DG600
  • Manufacturer
    Manitou Systems
  • Description
    High Density RF Plasma Sources

General Parameters

  • Application
    research/development, pumping, upstream gas introduction and instrumentation points
  • Plasma Chamber Material
    Quartz
  • Flange
    Type KF
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