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AX7696MKS-01

RF Plasma Source by MKS Instruments (5 more products)
AX7696MKS-01 Image

The AX7696MKS-01 from MKS Instruments is a RF Plasma Source with Gas Flow Rate up to 10 slm, Power Supply Up to 6 kW. More details for AX7696MKS-01 can be seen below.

Product Specifications

Product Details

  • Part Number
    AX7696MKS-01
  • Manufacturer
    MKS Instruments
  • Description
    Remote Plasma Source Up to 6 kW

General Parameters

  • Gas Flow Rate
    up to 10 slm
  • Gases
    Argon, Nitrogen
  • Operating Pressure
    0.5 to 4 Torr
  • Application
    Automated Process Control (APC), Fault Detection and Classification (FDC)
  • Cooling
    1.75 gpm
  • Current
    30 A
  • Input Voltage
    208 VAC
  • Plasma Chamber Material
    6061-T6 Aluminum, Kalrez, SiO2, 316L SS, Nickel, Fluorosilicone
  • Power Supply
    Up to 6 kW
  • Interfaces
    Analog, EtherCAT
  • Height
    12.25 Inch
  • Weight
    38.6 Kg
  • Dimension
    15.7 x 13.7 x 12.14 inch (L x W x H)
  • Temperature
    0 to 40 Degree C

Technical Documents
View details on the manufacturer's website
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