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HMPSQ-MKS

RF Plasma Source by MKS Instruments (5 more products)
HMPSQ-MKS Image

The HMPSQ-MKS from MKS Instruments is a RF Plasma Source with Output Frequency 2.44 to 2.47 GHz, Gas Flow Rate 1 to 10 slm, Power Supply 6 kW. More details for HMPSQ-MKS can be seen below.

Product Specifications

Product Details

  • Part Number
    HMPSQ-MKS
  • Manufacturer
    MKS Instruments
  • Description
    6 kW, Quartz Microwave Plasma Source

General Parameters

  • Output Frequency
    2.44 to 2.47 GHz
  • Gas Flow Rate
    1 to 10 slm
  • Operating Pressure
    1 to 10 Torr
  • Cooling
    0.50 gpm
  • Current
    1 A
  • Gas Line Connection
    4 VCR male
  • Input Voltage
    24 VDC
  • Plasma Chamber Material
    Quartz
  • Power Supply
    6 kW
  • Waveguide
    WR284
  • Flange
    CPR284F
  • Height
    18.52 Inch
  • Weight
    18 lbs
  • Dimension
    18.52 x 4.5 x 6.32 Inch

Technical Documents
View details on the manufacturer's website
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