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RF-4.5

RF Plasma Source by SVT Associates (2 more products)
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The RF-4.5 from SVT Associates is a RF Plasma Source with Gas Flow Rate 0.1 to 5 SCCM, RF Power Level 200 to 600 W, Source Diameter 2.35 Inches. More details for RF-4.5 can be seen below.

Product Specifications

Product Details

  • Part Number
    RF-4.5
  • Manufacturer
    SVT Associates
  • Description
    High Growth Rate RF Plasma Source

General Parameters

  • Gas Flow Rate
    0.1 to 5 SCCM
  • RF Power Level
    200 to 600 W
  • Gases
    Nitrogen, Oxygen, Hydrogen
  • Frequency tuning
    Manually Tuned Auto Tuning Optional
  • Source Diameter
    2.35 Inches
  • Application
    Nitride MBE, Oxide MBE, Research and production, Plasma Monitoring
  • Cooling
    0.17 GPM Flow Rate
  • Growth Rate
    up to 4 um/hr
  • Plasma Chamber Material
    PBN, Alumina, or Quartz
  • Valve
    flux
  • Flange
    4.50 Inches CF

Technical Documents
View details on the manufacturer's website
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