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VRF-X 600 -

RF Plasma Source by RIBER S.A. (2 more products)
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VRF-X 600 - Image

The VRF-X 600 - from RIBER S.A. is a RF Plasma Source with Output Frequency 13.56 MHz (Generator), Power Supply 600 W. More details for VRF-X 600 - can be seen below.

Product Specifications

Product Details

  • Part Number
    VRF-X 600 -
  • Manufacturer
    RIBER S.A.
  • Description
    13.56 MHz Valved RF Plasma Source

General Parameters

  • Output Frequency
    13.56 MHz (Generator)
  • Gases
    Nitrogen / Oxygen
  • Frequency tuning
    Automatic matching box
  • Cavity type
    Single piece cavity
  • Application
    dilute nitride
  • Control
    Integrated, micrometer motorized control
  • Cooling
    0, 2 l/min, Air
  • Impedance
    50 Ohms
  • Plasma Chamber Material
    PBN, Quartz
  • Power Supply
    600 W
  • Valve
    Flux valve, Isolation valve
  • Flange
    16/ VCR ¼’’

Technical Documents
View details on the manufacturer's website
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