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RF Plasma Sources - Page 3

24 RF Plasma Sources from 8 Manufacturers meet your specification.
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Manitou Systems - DG-80

RF Plasma Source from Manitou Systems
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Description:High Density RF Plasma Sources
Output Frequency:
80 MHz/ 13.56MHz
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AX7610Q Image
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MKS Instruments - AX7610Q

RF Plasma Source from MKS Instruments
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Description:3 kW, Quartz Chemical Plasma Source
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Paramount Series Image
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Advanced Energy Industries - Paramount Series

RF Plasma Source from Advanced Energy Industries
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Description:Advance Process Development 13.56 MHZ, 1.5 to 6 KW
Output Frequency:
13.56 MHz/2 to 60 MHz
RF Power Level:
15 to 6000 W
Frequency tuning:
5%
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Paramount Plus Series Image
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Advanced Energy Industries - Paramount Plus Series

RF Plasma Source from Advanced Energy Industries
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Description:Multi-Level Pulsing and Pulse Waveform Control for Emerging Plasma Applications
Output Frequency:
1 to 60 MHz
RF Power Level:
5 to 15 kW
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RF Plasma Sources Directory