RF Plasma Sources - Page 2

24 RF Plasma Sources from 8 Manufacturers meet your specification.
Description:13.56 MHz Valved RF Plasma Source
Output Frequency:
13.56 MHz (Generator)
Frequency tuning:
Automatic matching box
more info
Description:High Density RF Plasma Sources
more info
AX7696MKS-01 Image
Description:Remote Plasma Source Up to 6 kW
Gas Flow Rate:
up to 10 slm
more info
Description:Production RF Plasma Source
Gas Flow Rate:
0.1 to 10 SCCM
RF Power Level:
200 to 2000 W
Frequency tuning:
Automatic
more info
Description:High Speed RF Plasma Source for Nitrogen / Oxygen
Output Frequency:
13.56 MHz (Generator)
Frequency tuning:
Automatic matching box
more info
Description:RF Plasma Generator from 1 to 60 MHz
Output Frequency:
1 to 60 MHz
RF Power Level:
3.5 to 10 kW
Frequency tuning:
Up to ±10%
more info
HMPSS-MKS Image
Description:6 kW, Sapphire Microwave Plasma Source
Output Frequency:
2.44 to 2.47 GHz
Gas Flow Rate:
1 to 10 slm
more info
Description:Apex RF Generators and Power-Delivery Systems
Output Frequency:
13.56 MHz
RF Power Level:
1.5 to 10 kW
more info
Description:High Density RF Plasma Sources
Output Frequency:
13.56MHz
more info
AX7610S Image
Description:3 kW, Sapphire Chemical Plasma Source
more info

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